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Nanotechnology
1. Introduction to Microengineering
Full Description/Review/Comments
This web site provides a basic, but thorough introduction to microengineering - the technologies and practice of making three dimensional structures and devices with dimensions in the order of micrometers. The topics covered are MEMS, micromachines, and microstructures. The site contains two sections: the first section (Microengineering) is a document that seeks to explain what microengineering is, whereas the second part concerns the constituent parts of microengineering technologies. The microengineering section has a general emphasis on micromachining - the name for the techniques used to produce the structures and moving parts of microengineered devices, and silicon micromachining in particular. The document then introduces three of the micromachining techniques that are in use or under development, with silicon micromachining being given most prominence, since it is one of the better developed micromachining techniques (the other two are the Excimer laser, an ultraviolet laser. Information is also given about the process of designing masks for micromachining. The second part of the site is arranged under the three headings of microsystems, microsensors & microactuators. Under each heading is information about the different types of technology that can be used for making these components, how they work, and details of some common applications. The site also has a list of references and links to other tutorials and resources on relevant topics. This resource is a presented in a text book style, and consists mostly of text with a few diagrams to illustrate it. The index on the home page makes it useful for quick reference....
http://www.dbanks.demon.co.uk/ueng/
2. Precision micromanufacturing processes applied to miniat...
Full Description/Review/Comments
These tutorials, by Dr Craig Friedrich of Michigan Technological University s Department of Mechanical Engineering were produced as part of a US National Science Foundation programme. They describe the processes, tools, and techniques used to make and characterise microcomponents and systems by micromechanical machining utilising precision engineering practices. Precision engineering and practices are covered, along with an introduction to machining analysis. Then diamond micromachining, micromilling, microdrilling and laser micromachining are addressed. Keywords: optical lithography, x-ray lithography, microengineering, microsystems technology, MST, laser optics, laser ablation, laser polymerisation, miniaturisation technologies. The tutorials are intended to serve as the skeleton of a syllabus for several courses. They are similar in approach to an online text book, with photos, illustrations and diagrams. An Appendix provides a glossary of terms, links to sites of related interest, and course syllabi which have utilised the tutorials. In addition course recommendations and text for selected overheads are provided for instructors. A limited number of CD-ROMs containing the course materials, machining process videos and additional graphics are available to educators interested in adopting these course materials. Please send your request to the key contact Prof. Craig Friedrich....
http://www.me.mtu.edu/~microweb/
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